Measurement of demolding forces in full wafer thermal nanoimprint

The Jenoptik HEX03 embossing machine has been used in a slightly modified setup to measure the demolding forces online. 

We optimized the demolding setup to be able to compare ideal demolding processes with a range of process parameters, i.e. pattern design, structure depth and demolding temperature. The demolding force can be deduced from discontinuities of the force recording; these discontinuities, seen as characteristic “kinks” in the force curve, stem from a sudden release of the stamp from the polymer and the subsequent relaxation of the press column. In this research, we demonstrate that these forces are actual demolding forces.