Scientific publications

S. Merino, A. Retolaza, H. Schift, V. Trabadelo.

Stamp deformation and its influence on residual layer homogeneity in thermal nanoimprint lithography

In thermal nanoimprint lithography (NIL), one of the key points to be addressed is the printing uniformity on large areas. 

Magazine/Book MicroelectronicEngineering, 85, 877-880 (2008)
Date 2008
V. Trabadelo, H. Schift, S. Merino, S. Bellini, J. Gobrecht.

Measurement of demolding forces in full wafer thermal nanoimprint

The Jenoptik HEX03 embossing machine has been used in a slightly modified setup to measure the demolding forces online. 

Magazine/Book MicroelectronicEngineering, 85, 907-909 (2008)
Date 2008
J. Barriga, B. Fernandez-Diaz, A. Juarros, SIU Ahmed, JL Arana

Microtribological analysis of gold and copper contacts

There are millions of electrical contacts subject to relative motion: connectors, relays, chips in cards, switches… Friction and wear in this kind of devices are still a source of concern. 

Magazine/Book Tribology International
Date 2007-10
Pages 10/2007; 40(10-12):1526-1530
J. Barriga, B. Coto, B. Fernandez

Molecular dynamics study of optimal packing structure of OTS self-assembled monolayers on SiO2 surfaces

Optimal packing structure of Octadecyltrichlorosilane (OTS) self-assembled monolayer (SAM) adsorbed on a SiO2 (1 0 0) surface with a Si substrate was studied performing molecular dynamics (MD) computational simulations. 

Magazine/Book Tribology International
Date 2007-06
Pages Volume 40, Issue 6, June 2007, Pages 960–966
S. Merino, A. Retolaza, A. Juarros, S. Landis.

A new way of manufacturing high resolution optical encoders by nanoimprint lithography

A process based on nanoimprint lithography is proposed to manufacture linear encoders with a pitch below 1 μm. 

Magazine/Book MicroelectronicEngineering, 84, 848-852 (2007)
Date 2007
S. Merino, H. Schift, A. Retolaza, T. Haatainen.

The use of automatic demolding in nanoimprint lithography processes

Three different setups for automatic demolding in nanoimprint, including air induced demolding and fast and slow demolding, are studied for different stamps designs, and compared with standard manual demolding. 

Magazine/Book MicroelectronicEngineering, 84, 958-962 (2007)
Date 2007